Odd bounce image rotation system in ellipsometer systems

   
   

Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displaced locus, but with an azimuthally rotated polarization state. Application to, and methodology of application to set azimuthal angles of polarization in spectroscopic ellipsometer, polarimeter and the like systems is also disclosed.

É divulgado um sistema girar da imagem impar do salto com uma seqüência de um número impar de elementos refletindo, tais que um feixe eletromagnético polarizado causou entrar, interage reflexiva com o número impar de elementos e de saídas refletindo ao longo de um locus essencialmente non-deviated, non-deslocado, mas com um estado de polarization azimuthally girado. A aplicação a, e a metodologia da aplicação para ajustar ângulos azimuthal do polarization no ellipsometer spectroscopic, no polarímetro e nos sistemas semelhantes são divulgadas também.

 
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