Method for multi-frequency bonding

   
   

A method and technique for achieving a high strength bond between two substrates includes igniting a plasma using a source RF signal. The substrates are biased with a bias RF signal during surface treatment by the plasma. The treated surfaces are brought into contact. The resulting bonded substrates show an improvement over bonds attained using conventional bonding techniques.

 
Web www.patentalert.com

< Functional device, method of manufacturing therefor and driver circuit

< Analysis of MEMS mirror device using a laser for mirror removal

> Etch back of interconnect dielectrics

> Thinned semiconductor wafer and die and corresponding method

~ 00127