Micro-mechanical devices, such as MEMS, having layers thereon, and methods
of forming the layers, are disclosed. In one aspect, a method may include
forming a layer including an oxide of aluminum over at least a portion of
a micro-mechanical device, and coating the layer by bonding material to
surface hydroxyl groups of the layer. In another aspect, a method may
include introducing a micro-mechanical device into an atomic layer
deposition chamber, and substantially filling nanometer sized voids of
the micro-mechanical device by using atomic layer deposition to introduce
material into the voids. In a still further aspect, a method may include
introducing an alkylaminosilane to a micro-mechanical device having a
surface hydroxyl group, and bonding a silane to the micro-mechanical
device by reacting the alkylaminosilane with the surface hydroxyl group.