The present invention provides a salt represented by the formula (I): ##STR00001## wherein X represents an n-valent connecting group, Y.sup.1 and Y.sup.2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, n represents 2 or 3, and A.sup.+ represents an organic counter ion.The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).

 
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