A magnetic multi-element alloy film adapted to be used in a high-frequency
operation is provided. The magnetic multi-element alloy film is employed
to improve a Q factor and an inductance value of a thin film inductor
operated in high frequency. The design concept of a multi-element
high-entropy alloy is introduced into the magnetic multi-element alloy
film. With material characteristics including high randomness, nanometer
microcrystalline structure, low coercive magnetic field and high
resistivity, the magnetic multi-element alloy film can still have
favorable soft magnetism when operated in high frequency.