A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a light source. The mirror substrate includes multiple regions in each of portions thereof extending from the torsional rotary shaft to respective ends of the mirror substrate, the regions being different in flexural rigidity.

Web www.patentalert.com

< Semiconductor device and manufacturing method thereof

> Device package structure, device packaging method, droplet ejection head, connector, and semiconductor device

> Cathode header optic for x-ray tube

~ 00516