Methods and apparatuses are provided for protecting an interconnect line
in a microelectromechanical system. The interconnect line is disposed over a substrate
for conducting electrical signals, such as from a bonding pad to a mechanical component
to effect movement as desired of the mechanical component. A first protective covering
is disposed over a first portion of the interconnect line and a second protective
covering is disposed over a second portion of the interconnect line. The first
protective covering is provided in electrical communication with the substrate
and the second protective covering is electrically isolated from the substrate.