A variable optical attenuator for providing a new light attenuation mechanism based on using at least one of tilted mirrors to change and control the beam direction of reflected light beam toward output optical port in a two dimensional light path configuration is demonstrated to achieve the light attenuation in terms of changing and controlling the coupling loss among input optical port, reflective tilted mirrors, and output optical port. The tilted mirror is supported and connected by a suspended flexure spring at one side. This suspended spring is connected with tilted mirror at one side and is anchored on a substrate at the other side via a post (or a pivot). When the tilted mirror is driven by an actuator to generate movement including rotational mirror deflection and parallel mirror shifted displacement, the reflected light beam path is changed according to the particular mirror positions. The attenuation value is modified and controlled by the coupled light of reflected light beam to output port. The structure and materials of variable optical attenuator is designed and chose to be robust to environment mechanical and thermal noise.