In an aspect, an apparatus is provided that sets and reprograms the state of
programmable
devices. In an aspect, a method is provided such that an opening is formed through
a dielectric exposing a contact formed on a substrate. The resistivity of the contact
is modified by at least one of implanting ions into the contact, depositing a material
on the contact, and treating the contact with plasma. In an aspect, a spacer is
formed within the opening and programmable material is formed within the opening
and on the modified contact. A conductor is formed on the programmable material
and the contact transmits to a signal line.
