Methods and apparatus for electropolishing metal interconnections on semiconductor devices

   
   

An apparatus for electropolishing a wafer includes a wafer chuck and a stationary jet. The wafer chuck is configured to rotate and translate the wafer. The stationary jet is configured to apply an electrolyte to the wafer when the wafer is translated and rotated by the wafer chuck.

 
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> Silica mesoporous aerogels having three-dimensional nanoarchitecture with colloidal gold-protein superstructures nanoglued therein

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