Dual-sided capacitor


A dual-sided HSG capacitor and a method of fabrication are disclosed. A thin native oxide layer is formed between a doped polycrystalline layer and a layer of hemispherical grained polysilicon (HSG) as part of a dual-sided lower capacitor electrode. Prior to the dielectric formation, the lower capacitor electrode may be optionally annealed to improve capacitance.

Un condensador dual-sided de HSG y un método de fabricación se divulgan. Una capa nativa fina del óxido se forma entre una capa polycrystalline dopada y una capa del polysilicon granuloso hemisférico (HSG) como parte de un electrodo más bajo dual-sided del condensador. Antes de la formación dieléctrica, el electrodo más bajo del condensador se puede recocer opcionalmente para mejorar capacitancia.

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