Exposure apparatus, method of controlling same, and method of manufacturing devices

   
   

An exposure apparatus includes a stage which moves with an object thereon. A surface position detector is arranged to detect a surface position of the object at a timing that is asynchronous to a reference signal, and is provided for controlling the stage.

Прибор выдержки вклюает этап двигает с предметом thereon. Аранжированы, что обнаруживает поверхностное положение предмета на времени асинхронно к сигналу справки, и обеспечен поверхностный детектор положения для контролировать этап.

 
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