A material delivery system is provided for miniature structures fabrication
which has a substrate, a material carrier having a deposition layer, and a
laser beam directed towards the material carrier element. A control unit
is operatively coupled to the substrate, the material carrier element and
laser beam for exposing respective areas of the deposition layer to the
laser beam in a patterned manner so that the depositable material of the
deposition layer is transferred to the substrate surface for deposition on
its surface. The system operates in either an additive mode of operation,
or a subtractive mode of operation so that a workpiece does not have to be
removed from the tool when change of modes of operation takes place.
