System and method for estimating error in a manufacturing process

   
   

A system and method for estimating errors within a semiconductor fabrication process. The system identifies an optimal number of error components based upon relevant context items. The system further estimates the error within the fabrication process and attributes portions of the error to each of the identified error components based upon feedback data received from the manufacturing process.

 
Web www.patentalert.com

< Method of using time interval in IC foundry to control feed back system

< Robot pre-positioning in a wafer processing system

> Semiconductor device

> Semiconductor device and method of manufacturing the same

~ 00107