A method and apparatus for evaluating a semiconductor wafer. A combination of
a
photothermal modulated reflectance method and system with a photothermal IR radiometry
system and method is utilized to provide information which can be used to determine
properties of semiconductor wafers being evaluated. The system and method can provide
for utilizing a common probe source and a common intensity modulated energy source.
The system and method further provide an infrared detector for monitoring changes
in infrared radiation emitted from a sample, and photodetector for monitoring changes
in beam reflected from the sample.
