A matrix type piezoelectric/electrostrictive (PIE) actuator includes a
plurality of piezoelectric/electrostrictive elements, each including a
piezoelectric/electrostrictive body and at least one pair of electrodes
formed on a ceramic substrate. The matrix type P/E actuator is activated
by displacement of the piezoelectric/electrostrictive bodies. The
piezoelectric/electrostrictive elements are joined to the ceramic
substrate as respective unified bodies, and are two-dimensionally arranged
independently from each other. The piezoelectric/electrostrictive actuator
provides a greater displacement with a lower voltage, a high responsive
speed, and a greater generating force, as well as enhancing the mounting
ability and the integration. A method for manufacturing such a matrix type
P/E actuator is also disclosed.
