In-situ randomization and recording of wafer processing order at process tools

   
   

Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.

A ordem do wafer é in-situ randomized pelo uso de uma área de estágio do wafer separado e wafers aleatòria baralhar a e desta área de estágio para baralhar a ordem processando do lote do wafer. Os dados posicionais são capturados para cada wafer na emissão e recebem fins do processo.

 
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