FeRAM having BLT ferroelectric layer and method for forming the same

   
   

A ferroelectric memory device and a method for manufacturing the same is disclosed. Because a (Bi.sub.x La.sub.y)Ti.sub.3 O.sub.12 (BLT) layer, which can be crystallized in relatively low temperature, is used in a capacitor, the electrical characteristics of the ferroelectric capacitor can be improved. The method for manufacturing ferroelectric memory device includes the steps of forming a first conductive layer for a bottom electrode on a semiconductor substrate, forming the (Bi.sub.x La.sub.y)Ti.sub.3 O.sub.12 ferroelectric layer, wherein `x` representing atomic concentration of Bi ranges from about 3.25 to about 3.35 and `y` representing atomic concentration of La ranges from about 0.70 to about 0.90 and forming a second conductive layer for a top electrode on the (Bi.sub.x La.sub.y)Ti.sub.3 O.sub.12 ferroelectric layer.

 
Web www.patentalert.com

< Cross point memory array using distinct voltages

< Ferroelectric memory devices

> Ferroelectric capacitor and process for its manufacture

> Cu film deposition equipment of semiconductor device

~ 00116