In a concentration sensor using a piezoelectric piece, for instance, a
quartz piece in which the natural frequency is varied by adsorption of a
sensing target, the object of the present invention is to make the
concentration sensor applicable to various fluids to be measured
different in viscosity while restricting consumption of the oscillation
energy due to interelectrode capacitance, and to be able to cope with
plural types of concentration sensors while using a common oscillation
circuit.
As a concrete means for solving the problem, an inductor is connected in
parallel to the piezoelectric piece, and its inductance value is
determined based on the relation between inductance values and
oscillation loop gains in a gap between the inductance value Lmax
canceling the interelectrode capacitance in a resonance frequency of the
piezoelectric piece and the inductance value Lmin evaluated as the
minimum value among the inductance values with which the piezoelectric
piece can oscillate in a state of being immersed in a measuring fluid.