A positive photosensitive composition comprises (A) a resin that has an
acid decomposable repeating unit represented by formula (I) and increases
its solubility in an alkali developer by action of an acid; (B) a
compound generating an acid in irradiation with actinic light or
radiation; (C) a resin that contains neither fluorine nor silicon and has
a repeating unit having the predetermined structure; and (D) a solvent,
##STR00001## wherein each symbol represents a predetermined group.