A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment.

 
Web www.patentalert.com

< Gas barrier laminate film and method for producing the same

> Edge-on SAR scintillator devices and systems for enhanced SPECT, PET, and compton gamma cameras

> Method and apparatus of multi-energy imaging

~ 00569