A method is disclosed that includes providing a substrate having a resist
adheringly disposed thereon, providing a heat source adjacent to the
resist, and activating the heat source while providing a topographically
patterned template pressed against the resist. The heat source and the
resist are disposed between the substrate and the template, such that the
heat source provides a localized application of heat to the resist while
the topographically patterned template is pressed against the resist.