The present invention provides a salt represented by the formula (I): ##STR00001## wherein Q.sup.1 and Q.sup.2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, T represents a methylene group or a carbonyl group, R represents an adamantyl group substituted with at least one selected from the group consisting of a C1-C4 alkyl group, a C1-C4 alkoxy group, a hydroxyl group, a hydroxymethyl group, a cyano group and an oxo group, and A.sup.+ represents an organic counter ion.The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).

 
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