Methods are provided for making a reservoir-based sensor device. The
method may include fabricating a first substrate portion which comprises
an upper surface, an opposed lower surface, a plurality of through holes
defining reservoirs between said upper surface and said lower surface,
and a plurality of reservoir caps closing off one end of said through
holes at said upper surface; fabricating a plurality of sensors on an
upper surface of a second substrate portion; aligning the first and
second substrate portions such that each of said plurality of sensors is
in alignment with each of said plurality of reservoirs; and bonding
together the lower surface of said first substrate portion and the upper
surface of said second substrate portion to seal each of said sensors
inside the reservoir with which it is aligned.