An apparatus and method for providing image acquisition and/or image
display in a limited region of interest (ROI). The apparatus comprises a
micro electro-mechanical system (MEMS), preferably integrating a light
source, a cantilever, a lens, an actuator, a light detector, and a
position sensor. The light source provides light for illuminating the
ROI, displaying an image, providing a therapy, and/or performing other
functions. The cantilever comprises a resin waveguide with a fixed end
attached to a substrate that supports many or all other components. A
free end of the cantilever is released from the substrate during
fabrication and includes the lens. The actuator scans the free end in
orthogonal directions to illuminate the ROI or display an image. The
position sensors detect the position of the free end for control. The
light detector receives light backscattered from the ROI separate from,
or at the fixed end the cantilever.