A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system programmed with a calibration routine. The calibration array has an plurality of inductive proximity sensors to determine parallelism of the robot relative to a station and a center locating sensor to determine the center of the station.

 
Web www.patentalert.com

< System for carrying an item

> Apparatus and method for detecting position of mobile robot

> Vehicle having an articulator

~ 00527