A method of making an interferometric modulator element includes forming
at least two posts, such as posts formed from spin-on glass, on a
substrate. In alternate embodiments, the posts may be formed after
certain layers of the modulator element have been deposited on the
substrate. An interferometric modulator element includes at least two
spin-on glass support posts located on the substrate. In alternate
embodiments, the support posts may be located over certain layers of the
modulator element, rather than on the substrate. A method of making an
interferometric modulator element includes forming a rigid cap over a
support post. An interferometric modulator element includes support posts
having rigid cap members.