A process for fabricating a combined micro electromechanical/gallium
nitride structure. The micro electromechanical structure comprises a
piezoelectric device, such as a piezoelectric switch or a bulk acoustic
wave device. According to the process, high Q compact bulk acoustic wave
resonators can be built. The process is applicable to technologies such
as tunable planar filter technology, amplifier technology and high speed
analog-to-digital converters.