Temperature aware testing enables computation of thermal test vectors that are applied, via a tester, to a Device Under Test (DUT) to place various internal elements of the DUT at respective temperature operating points. The respective temperature operating points are selected to sensitize the DUT to measurements of selected temperature-dependent critical parameters, including frequency, leakage current behaviors, voltage drops, power profiles, thermal gradients, and absolute temperature. In operation, the thermal test vectors are applied to the DUT for a sufficient time for the DUT to reach thermal equilibrium, or alternatively for the internal elements to reach the respective temperature operating points. Subsequently critical parameter vectors are applied to enable measurement of one or more of the critical parameters. The critical parameter vectors are typically developed based in part on a multi-dimensional temperature map analysis of the DUT, using manufacturing process parameters and device physical design (or layout) information.