A bevel inspection module for capturing images of a substrate is provided.
The module includes a rotational motor, which is attached to a substrate
chuck and is configured to rotate the substrate chuck thereby allowing
the substrate to revolve. The module further includes a camera and an
optic enclosure, which is attached to the camera and is configured to
rotate, enabling light to be directed toward the substrate. The camera is
mounted from a camera mount, which is configured to enable the camera to
rotate on a 180 degree plane allowing the camera to capture images of at
least one of a top view, a bottom view, and a side view of the substrate.
The module yet also includes a backlight arrangement, which is configured
to provide illumination to the substrate, thereby enabling the camera to
capture the images, which shows contrast between the substrate and a
background.