A cathode substrate 10 is heated to 400 to 600.degree. C. in the atmosphere of hydrocarbon gas such as methane and the gas is allowed to react with the surface of the cathode substrate 10 by a thermal CVD method. Thus, an electron emission source in which graphite nano-fibers 11 are allowed to grow in a gaseous-phase on the surface of the cathode substrate 10 by using nickel or iron existing on the surface of the cathode substrate 10 as a nucleus is held between upper and lower end hats 12 to form a cathode part 13.

 
Web www.patentalert.com

< Gate configuration for nanowire electronic devices

> Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography

~ 00487