Systems and methods are provided for delivering solid precursors. In
certain embodiments of the present application, a flow monitor, pressure
sensor, or temperature sensor is used to measure and regulate the flow of
vaporized solid precursor material from a vaporization chamber to a
deposition chamber. To avoid condensation of the solid precursor material
in the delivery lines, a controller is placed in a feed back loop to make
adjustments to the amount of vapor available. Additional embodiments are
disclosed and claimed.