In a preferred embodiment, a method of identifying nuclides, including the steps of: determining spectral continuum via a peak erosion process to render a residual peak spectrum; filtering a standard nuclide library specified by a user to select candidate nuclides; simultaneously fitting calibrations and activities of selected candidate nuclides from the standard library to the peak spectrum using a standard least squares method; calculating statistical significances of optimized nuclide activities and determining shape correlations between optimized candidate nuclide peak spectra and measured peak spectrum with alternative candidates subtracted; and identifying and providing activities of nuclides determined to have sufficiently significant activities and sufficient shape correlations.


< Substrate inspection apparatus, substrate inspection method and method of manufacturing semiconductor device

> Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby

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