A mesovalve having a diaphragm situated between a first chamber and a
second chamber. There may be an inlet and an outlet in the first chamber.
The diaphragm may provide an orifice between the first and second
chambers. There may be a first electrode on the diaphragm and a second
electrode on an inside surface of the second chamber. The diaphragm may
have first and second positions, or numerous variable positions. Applying
a voltage across the electrodes may electrostatically move the diaphragm
to the second position during which the outlet is at least partially
opened for fluid communication with the inlet, the orifice is closed and
the diaphragm is stopped in the second position by a cushioning fluid
pressure in the second cavity to prevent pull-in. Removing the voltage
from the electrodes may let the diaphragm return to the first position,
open the orifice and close the outlet.