A manufacturing method of an ink jet recording head including a discharge port for discharging ink includes the step of forming the discharge port by performing dry etching of a discharge port forming member for forming the discharge port, wherein the discharge port forming member is formed of a Si including resin, and the step of dry etching is performed by using an etching gas including oxygen and chlorine as necessary components.

 
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< Method of manufacturing substrate for ink jet recording head and method of manufacturing recording head using substrate manufactured by this method

> Ink jet head substrate, ink jet head, and method of manufacturing an ink jet head substrate

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