A method of forming a structure. The method including: forming a precursor
layer on a substarte, the precursor layer including a resin and,
polymeric nano-particles dispersed in the resin, and a solvent, each the
polymeric nano-particle comprising a multi-arm core polymer and pendent
polymers attached to the milti-arm core polymer and pendent polymers
attached to the multi-arm core polymer, the multi-arm core polymer
immiscible with the resin and the pendent polymers miscuble with the
resin; heating the precursor layer to cross-link at least about 90% of
the resin thereby converting the pre-baked precursor layer to a
dielectric layer; forming trenches in the dielectric layer and filling
the trenches with an electrical conductor; heating the dielectric layer
to thermally decompose at least acout 99.5% of the polymeric
nano-particles into decomposition products and to drive the decomposition
products out of the dielectric layer.