The present invention relates to conveyance method for transporting a
plurality of unprocessed/processed objects between an automatic
transporting device (AGV) and a semiconductor manufacturing device
(prober). The prober has a load port to/from which the objects are
delivered from/to the AGV. The method comprises the steps of: making a
communication between the AGV and the prober to decide respective timings
of deliveries of the objects to/from the load port; and transporting the
objects between the AGV and the prober via the load port, with the
timings of the deliveries of the objects to/from the load port shifted
from each other by using a holding site for provisionally holding the
object. The holding site is at least one of components of the AGV and the
prober other than the load port.