In a high pressure processing system configured to treat a substrate, a flow measurement device is utilized to determine a flow condition in the high pressure processing system. The flow measurement device can, for example, comprise a turbidity meter. The flow parameter can, for example, include a volume flow rate or a time to achieve mixing of a process chemistry within a high pressure fluid used to treat the substrate.

 
Web www.patentalert.com

< Method and system for determining the location of a potential defect in a device based on a temperature profile

> Method and apparatus for associating an error in a layout with a cell

~ 00468