An exposure apparatus is provided with an optical system including a
liquid, a sensor system for acquiring energy information of an energy
beam which is incident on the liquid, and a controller which predicts
variation of optical properties of the optical system including the
liquid due to energy absorption of the liquid based on the energy
information acquired using the sensor system and controls exposure
operation with respect to an object based on the prediction results.
According to the exposure apparatus, exposure operation without being
influenced by the variation of the optical properties of the optical
system including the liquid due to the energy absorption of the liquid
becomes possible.