Metal oxide nanowires are being investigated to make nanodevices and
nanosensors. High operation temperatures or vacuum is required in the
manufacturing of metal oxide nanowires by existing vapor phase
evaporation methods. This invention provides a method of manufacturing
metal oxide nanowires by first providing a metal to form a non-linear
substantially planar structure defining a surface. The metal is then
heated and maintained at a temperature from 300 to 800.degree. C., and
then exposed to oxygen and water vapor containing air stream for a
sufficient period of time to form the metal oxide nanowires. The oxygen
containing air stream flows in a direction substantially parallel to the
plane of the structure. Relatively low temperatures may be used and no
vacuum is required in this method, thereby reducing the overall
manufacturing costs. Further, this method is able to manufacture
different densities of the metal oxide nanowires simultaneously.