A micromechanical resonator structure including a plurality of straight or
substantially straight beam sections that are connected by curved or
rounded sections. Each elongated beam section is connected to another
elongated beam section at a distal end via the curved or rounded sections
thereby forming a geometric shape having at least two elongated beam
sections that are interconnected via curved or rounded sections (for
example, a rounded triangle shape, rounded square or rectangle shape).
The structure includes one or more nodal points or areas (i.e., portions
of the resonator structure that are stationary, experience little
movement, and/or are substantially stationary during oscillation of the
resonator structure) in one or more portions or areas of the curved
sections of the structure. The nodal points are suitable and/or
preferable locations to anchor the resonator structure to the substrate.
In operation, the resonator structure oscillates in a combined elongating
(or breathing) mode and bending mode; that is, the beam sections (which
oscillate or vibrate at the same frequency) exhibit an elongating-like
(or breathing-like) motion and a bending-like motion.