An x-ray imaging system uses particular emission lines that are optimized
for imaging specific metallic structures in a semiconductor integrated
circuit structures and optimized for the use with specific optical
elements and scintillator materials. Such a system is distinguished from
currently-existing x-ray imaging systems that primarily use the integral
of all emission lines and the broad Bremstralung radiation. The disclosed
system provides favorable imaging characteristics such as ability to
enhance the contrast of certain materials in a sample, to use different
contrast mechanisms in a single imaging system, and to increase the
throughput of the system.