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There is provided a through structure of connecting lines extending
through a wall of a gastight chamber. The through structure of the
connecting lines is capable of positively sealing between the wall and
the connecting lines extending therethrough. The through structure
enables the connecting lines to extend through the wall of the gastight
chamber for connecting a work processing apparatus contained in the
gastight chamber and accessories for the work processing apparatus. The
through structure comprises a through sleeve extending through the wall,
with the connecting lines extending therethrough, a first seal member
filled in the through sleeve for sealing between the through sleeve and
the connecting lines, and a second seal member for sealing between the
through sleeve and the wall.
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< Liquid drop discharge head, discharge method and discharge device; electro optical device, method of manufacture thereof, and device for manufacture thereof; color filter, method of manufacture thereof, and device for manufacture thereof; and device incorporating backing, method of manufacture thereof, and device for manufacture thereof
> Electro-optical device and method of manufacturing the same, element driving device and method of manufacturing the same, element substrate, and electronic apparatus
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~ 00441
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