A treatment apparatus of the present invention includes a hermetic door
115b and a retort 115c as an interface for taking out a gaseous emission
containing vaporized substances from an object to be treated which is
being heated in a reduced pressure state in a second hermetic chamber 103
while maintaining conditions in the second hermetic chamber. When the
retort 115c is inserted into a first opening 103b of the second hermetic
chamber, the hermetic door 115b in an open state is shielded from the
second hermetic chamber 103, whereby condensation of the gaseous emission
at the hermetic door is prevented. Accordingly, condensates can be taken
out while conditions such as temperature and pressure in the hermetic
chamber are maintained without the treatment apparatus being stopped. The
productivity of treatment is greatly improved by continuous operation of
such a treatment apparatus.