A combination interferometer (ifo) inspection device is provided which includes a Twyman-Green (T-G) ifo optically coupled to a Mach-Zehnder (M-Z) ifo. MEMS and MOEMS versions permit substantial reduction in size and weight to permit permanently embedding an inspection device into an optical system which permits remote and automated inspection and/or adjustment of the optical system. The inspection device permits use of different coherence length light sources and receipt of an output signal from an optical system. The addition of the T-G ifo to the M-Z ifo aids pinhole alignment and general alignment to the optical system under test, as well as inspection with long coherence sources, while the addition of the M-Z ifo permits measurement with long or short coherence sources, allows measurement of the output beam, and permits the system to operate in a receive-only mode with an external source. The inspection device provides versatile functionality and redundancy for using a single inspection device in a variety of situations and manners in the same application.