A rotatable contamination barrier for use with an EUV radiation system is disclosed. The contamination barrier has a blade structure configured to trap contaminant material coming from a radiation source, a bearing structure, coupled to a static frame, configured to rotatably bear the blade structure, and an eccentric mass element displaced relative to a central axis of rotation to balance the blade structure in the bearing structure.

 
Web www.patentalert.com

< Layered composite material for plain bearings, production and use thereof

> Sealing device and rotation detector

~ 00431