A method of manufacturing an electronic device comprising a thin film
transistor (42), comprises forming a hydrogen-containing layer (22) over
a semiconductor layer (10;20), irradiating the hydrogen-containing layer
so as to hydrogenate the semiconductor layer, and then forming electrodes
(24;26,28) over the semiconductor layer. A short diffusion length and
direct path is provided for the hydrogen thus allowing rapid
hydrogenation of the semiconductor layer using relatively few,
high-fluence laser pulses. The supporting substrate (12) is not heated
significantly making the method particularly useful for TFTs on polymer
substrates. Crystallisation and hydrogenation of the semiconductor layer
can be executed in the same irradiation step.