An underlayer of a phosphor layer is disposed on a sensor panel including
two-dimensionally arranged photoelectric conversion devices. The surface
of the underlayer is subjected to atmospheric pressure plasma treatment.
The phosphor layer is formed on the surface-treated underlayer. Then, the
phosphor layer is covered with a moisture-resistant protective layer, a
reflection layer, and another protective layer. Thus, the phosphor layer
is prevented from peeling due to adhesion failure, and is constituted of
uniformly shaped crystals by vapor deposition. A resulting radiation
detecting apparatus exhibits high sensitivity and high definition,
producing a uniform photoelectric conversion efficiency.