An apparatus for measuring a goniometric reflection property of a sample has: one or more illuminators; a toroidal mirror which is rotationally symmetrical around a center axis effectively contacting with a surface of the sample; a light receiver having an incident aperture on the center axis; a rotating optics which rotates around a rotation axis which effectively coincides with the center axis; and a controller for controlling operations of the illuminators, the light receiver, and the rotating optics, wherein the toroidal mirror reflects light fluxes emitted from the surface of the sample illuminated by the one or more illuminators in emitting directions perpendicular to the center axis and directs each of the light fluxes to the center axis, and wherein the rotating optics specifies one of the light fluxes reflected by the toroidal mirror and directs the specified light flux to the incident aperture of the light receiver.

 
Web www.patentalert.com

< Method for detecting an end-point for polishing a material

> Method for inspecting a grating biochip

~ 00424