The invention intends to provide a manufacturing method of a semiconductor
integrated circuit device, which can detect an off-specification faulty
wafer in real time. An abnormality detection server stores apparatus log
data outputted from semiconductor manufacturing apparatus that processes
a semiconductor wafer in an apparatus log data memory. Thereafter, in a
lot end signal receiver, when a lot end signal outputted from the
semiconductor manufacturing apparatus is received, an abnormal data
detector, after referencing an abnormality detection condition setting
file stored in a first detection condition memory, based on the
referenced content, judges whether there are abnormal data in the
apparatus log data stored in the apparatus log data memory or not. Upon
detecting an abnormality, a detection result is outputted to an engineer
PC and an operator terminal unit.